WebThe resolution of the polymer bound PAG type resist reaches 17.5nmhp with 35nm thickness and there is possibility that the resolution of an optimized polymer bound PAG type resist reaches under 15nmhp. The resolution of the resist with lower capillary force (C.F.) given and lower swelling and on higher NILS exposure tool strongly depends on the ... WebThe polymer obtained in the experiment was confirmed by 1 H-NMR, and thermal stability was analyzed by thermal gravimetric analysis (TGA) and differential scanning calorimetry …
Characterizing polymer bound PAG-type EUV resist (2011) - SPIE
WebApr 15, 2011 · Blurs, swelling properties and lithographic performance for polymer bound PAG and polymer PAG blended type resists were studied. A Blur strongly depends on PAG … WebApr 6, 2024 · Types of polymer quenchants. Today, there are many different types of polymers in use. Examples of these types of polymers include polyacrylates, polyvinyl alcohol, p olyvinylpyrrolidone, polyethyloxazoline, polyethylene glycol and the most popular polyalkylene glycol (or PAG). The types of polymers and their characteristics are seen … leather scout carry sheath
Optimization of Polymer-bound PAG (PBP) for 20nm EUV …
WebISBN: Author: Arthur Provatas Format: PDF, Docs Category: Explosives Access Book Description Abstract: In an effort to comply with Insensitive Munitions (IM) criteria … WebA new series of anionic photoacid generators (PAGs) and corresponding polymers were prepared. The thermostability of PAG bound polymers was superior to that of PAG blend … Weblithography to indicate that the polymer bounded PAG resists have a potential to fabricate nanostructures. In this paper, we present a new PAG bound polymer comprising glycidyl methacrylate (GMA), methyl methacrylate (MMA), and triphenylsulfonium salt methacrylate (TPSMA) for use in electron beam resist. leather scoped pistol holsters